Extended Data Fig. 8: Heterogeneous Si3N4-LiNbO3 wafer characterization.
From: Ultrafast tunable lasers using lithium niobate integrated photonics
(a,d,g,j) Transmission of bus–waveguide coupled to heterogeneous Si3N4-LiNbO3 microresonator with free spectral range (FSR) 102 GHz (C11) from 3 fields of the wafer and different microresonators on a chip (F7 WG3.3, F1 WG3.3, F7 WG4.2, F5 WG4.1); (b,e,h,k) Frequency-dependent intrinsic microresonator loss κ0/2π (green) and bus–waveguide coupling κex/2π (blue). (c,f,i,l) Histogram of intrinsic microresonator loss rate of wafer D67_01b.
