Extended Data Fig. 1: Illustration of the principle of the vertical actuator and rotary three-phase stepper.
From: On-chip multi-degree-of-freedom control of two-dimensional materials
(a) Illustration of the vertical actuator at rest position. (b) Vertical actuator driven by a voltage Vz. (c) Illustration of the rotary actuator with a three-phase electrode. (d) Micro-stepping voltage waveform for driving the rotary actuator. The vertical axis is normalised voltage on each phase.
