Table 7 Preview of Plasma-MDS metadata for the dataset “Correlation of helicality and rotation frequency of filaments in the ntAPPJ”25.
From: Plasma-MDS, a metadata schema for plasma science with examples from plasma technology
Id | Field | Value |
---|---|---|
Plasma source | ||
1.1 | plasma.source.name | ntAPPJ, HF plasma jet |
1.2 | plasma.source.application | PECVD |
1.3 | plasma.source.specification | AC, high frequency, atmospheric pressure, non-thermal |
1.4 | plasma.source.properties | Non-thermal atmospheric pressure plasma jet (capacitively coupled) operated in a self-organized regime (locked mode). Power: 7 to 9 W; Frequency: 27.12 MHz; Flow rate: 400 to 800 sccm argon; Electrodes: ring configuration, distance 5 mm, width 5 mm; Capillary: inner diameter 4 mm, outer diameter 6 mm |
1.5 | plasma.source.procedure | The measurements occur 30 minutes after temperature conditioning of the plasma source for each parameter setting. |
Plasma medium | ||
2.1 | plasma.medium.name | Ar |
2.2 | plasma.medium.properties | Flowrate: 0.4 to 0.8 slm; Pressure: 1 bar; Temperature: 300 to 1000 K; Purity: argon 6.0 |
2.3 | plasma.medium.procedure | Standard conditions of the argon gas are assured. |
Plasma target | ||
3.1 | plasma.target.name | — |
3.2 | plasma.target.properties | — |
3.3 | plasma.target.procedure | — |
Diagnostics | ||
4.1 | plasma.diagnostics.name | laser schlieren deflectometry, fast imaging |
4.2 | plasma.diagnostics.properties | The filament behaviour has been visualized optically by means of imaging. The LSD set-up consists of a He-Ne laser (Linos) and a high-speed CMOS camera (Photon Focus). ... |
4.3 | plasma.diagnostics.procedure | The displacement of the laser spot on the image sensor of the camera is monitored directly. The laser beam is led perpendicular through the effluent region, close to the nozzle of the capillary (z = 0 mm). The output power of the laser is ... |