Figure 2
From: Nano silica diaphragm in-fiber cavity for gas pressure measurement
The reflection spectrum (a) and SEM images (b–e) of an FPI-based gas pressure sensor specimen employing an FDC. The inset of (a) presents an optical microscopy image. (b) SEM image of the nanometer-scale all-silica diaphragm fused at the end of the silica capillary. (c) SEM image of a fractured end of the FDC, while (d,e) present enlarged SEM images of the silica diaphragm, showing a sensing diaphragm thickness of about 170 nm.
