Table 1 Parameter comparison of several FPIs.
From: Nano silica diaphragm in-fiber cavity for gas pressure measurement
Samples | Cavity length (µm) | Gas pressure sensitivity (nm/kPa) | Temperature sensitivity (pm/°C) | cross-sensitivity (Pa/°C) |
|---|---|---|---|---|
FAB1 | 73 | 4.34 × 10−2 | 38.60 | 889.40 |
FDC1 | 155 | 1.25 | 184 | 147.20 |
FAB2 | 150 | 1.27 × 10−1 | 59 | 464.57 |
FDC2 | 55 | 12.22 | 1300 | 106.38 |
