Figure 1
From: Digital Etch Technique for Forming Ultra-Scaled Germanium-Tin (Ge 1−x Sn x ) Fin Structure

Illustration of the process flow for fabrication of extremely scaled Ge or Ge1−x Sn x fins.
From: Digital Etch Technique for Forming Ultra-Scaled Germanium-Tin (Ge 1−x Sn x ) Fin Structure

Illustration of the process flow for fabrication of extremely scaled Ge or Ge1−x Sn x fins.