Table 1 Comparison with pH sensing devices composed of various membranes with different treatments.

From: Influence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors

Sensing membrane

pH sensitivity (mV/pH)

Hysteresis voltage (mV)

Drift rate (mV/h)

ZnO with RTA

42.54

7.37

1.78

Nb2O5 with CF4

52.15

5.22

3.34

Gd2O3 with RTA

48.29

5.8

2.2

Gd2TiO7 with RTA

55.27

3.6

1.37

CeO2

34.37

27.7

9.91

CeO2 with NH3

48.62

7.8

0.51

Ce2Ti2O7

37.79

20.8

5.81

Ce2Ti2O7 with NH3

52.43

5.6

0.21

  1. (RTA: rapid thermal annealing. CF4: CF4 plasma treatment. NH3: NH3 plasma treatment).
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