Figure 2

(a) The optical fields of the mid-IR waveguide were calculated at λ = 2.50 µm, 2.85 µm, and 3.20 µm. Fundamental modes with similar ellipsoid intensity distributions were resolved in the Si layer in all three wavelengths. (b) and (c) are the calculated 1D intensity profiles of the TE modes and the TM modes, along the z axis, respectively.