Table 2 Experimental parameters for SEM-EDX imaging of the different samples.

From: Image-Based Chemical Structure Determination

 

CuS particles

Cell samples

Ceramics

Aerosol Sample

Magnification

2600×

4000×

1500×

1200×

SEM acceleration voltage (kV)

10

5

25

10

EDX imaged area (µm)

129 × 99

87 × 67

225 × 173

282 × 216

EDX spatial resolution (nm)

126

85

220

275

Exported elements from EDX

Al, Cu, O, S

Au, Br, C, Ca, Cl, K, Mg, N, Na, O, P, Pd, S

Al, C, Fe, Hf, O, Si, Y, Zr

Al, Ba, C, Ca, Cl, Cr, Cu, Fe, K, Mg, Mn, N, Na, O, P, S, Si, Zn