Figure 5

Reflectance curves of Si wafers with parabolic Si nanostructures (a) before and (b) after SiNx deposition. Three different sizes of silica beads (P310, P520, P960) were used for RIE masks. Average reflectance values of the Si wafers with parabolic Si nanostructures before and after SiNx deposition. Reflectance values of planar Si wafers (bare Si) without nanostructures are also shown together for comparison.