Figure 3
SIMS depth profiles of SiON:H grown at a deposition temperature of 160 °C and N2O flow of 2 sccm. The blue lines are profiles before PCT, and the red lines are profiles after PCT of 30 h.
Figure 3 | Scientific Reports
SIMS depth profiles of SiON:H grown at a deposition temperature of 160 °C and N2O flow of 2 sccm. The blue lines are profiles before PCT, and the red lines are profiles after PCT of 30 h.
