Figure 7
HR-RBS spectra of a bi-layer film, SiON:H (N2O:2 sccm, 30 nm) on SiON:H (N2O:10 sccm, 100 nm), after PCT of 0, 30, 50, 70 h.
Figure 7 | Scientific Reports
HR-RBS spectra of a bi-layer film, SiON:H (N2O:2 sccm, 30 nm) on SiON:H (N2O:10 sccm, 100 nm), after PCT of 0, 30, 50, 70 h.
