Table 2 Vapour deposition of phase pure brookite reported in the literature.

From: High-fraction brookite films from amorphous precursors

PVD Method

Substrate

Thickness (nm)

PEALD19

(110) YSZ

~80

MAPLE20

(100) Si

~50

PECVD22

(100) Si

Unknown

MOCVD21

(110) YSZ

60

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