Table 1 Optical parameters of developed mirror.

From: Ellipsoidal mirror for two-dimensional 100-nm focusing in hard X-ray region

Parameter

Conditions

Surface profile

Ellipsoid

Substrate material

Synthetic fused silica

Surface coating

Platinum 50 nm

Mirror substrate size

100 mm × 50 mm × 30 mm

Effective mirror dimension:

  in the meridional focusing direction

93 mm

  in the sagittal focusing direction

0.45 mm

Grazing-incidence angle at the mirror center

9.0 mrad

Focal length:

  light source to mirror center

50 m

  mirror center to focus

200 mm

Semimajor axis

25.10 m

Semiminor axis

28.46 mm

Spatial acceptance:

  in the meridional focusing direction

840 µm

  in the sagittal focusing direction

450 µm

Numerical aperture:

  in the meridional focusing direction

0.0021

  in the sagittal focusing direction

0.0011

Diffraction-limited focus size at 7-keV X-ray:

  in the meridional focusing direction

37 nm (FWHM)

  in the sagittal focusing direction

67 nm (FWHM)