Figure 1
From: Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Fabrication of a 3D surface profile using a raster-scanned thermal probe to locally remove the resist material. (a) Target (gray) and actual experimental (blue) 3D surface profile formed by raster scanning the tip. (b) Write mode in trace direction: a voltage V H is applied to the resistor located at the base of the cantilever’s tip to heat it using Joule heating. At each write pixel location, a voltage pulse V F is applied to the substrate. This voltage generates an electrostatic force which pulls the tip from a distance of ≈100 nm into contact with the resist. The resist is evaporated as the tip moves in the trace direction. (c) Read mode (retrace direction): the heater and substrate voltages are switched off and the z-piezo is extended to bring the tip into contact with the surface. The patterning result is measured as the tip moves in the retrace direction. A feedback loop compares the target and the measured topography for the last read-back line and determines an appropriate update for the patterning parameters.