Figure 1

Surface morphology of as-grown AlN templates. Plan-view and 45°-tilted SEM images of surfaces of as-grown and wet-etched AlN layers annealed at (a,d) 1000 °C, (b,e) 1100 °C, and (c,f) 1200 °C, respectively.
Surface morphology of as-grown AlN templates. Plan-view and 45°-tilted SEM images of surfaces of as-grown and wet-etched AlN layers annealed at (a,d) 1000 °C, (b,e) 1100 °C, and (c,f) 1200 °C, respectively.