Figure 3

Typical bird’s-eye and plan-view SEM images of mixed-polarity AlN template after wet chemical etching. (a,d) 20 min and (b,e) 40 min. (c,f) Images of regrown MQWs on the AlN nanorods etched for 40 min.
Typical bird’s-eye and plan-view SEM images of mixed-polarity AlN template after wet chemical etching. (a,d) 20 min and (b,e) 40 min. (c,f) Images of regrown MQWs on the AlN nanorods etched for 40 min.