Figure 6 | Scientific Reports

Figure 6

From: Deep-Ultraviolet AlGaN/AlN Core-Shell Multiple Quantum Wells on AlN Nanorods via Lithography-Free Method

Figure 6

TEM images of regrown AlGaN/AlN MQWs. (a) The regrown MQWs consist of three facets. (b) On the (0002) c-plane facet, which has the highest growth rate, a truncated pyramid shape is grown. (c) The (1–100) m-plane MQWs grown on the upper part of the nanorods are thicker than those on the lower part. (d) The thickness of m-plane MQWs is decreased in the lower region. (e) The MQWs grown on the (10-1-1) facet are thinner than those on the other facets owing to insufficient reactant delivery and a lower growth rate.

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