Figure 4 | Scientific Reports

Figure 4

From: Polarization-maintaining reflection-mode THz time-domain spectroscopy of a polyimide based ultra-thin narrow-band metamaterial absorber

Figure 4

Schematic cross-sectional view of the fabrication process flow of a single unit cell. Steps of the fabrication process flow: (a) thermal evaporation of metal Au/Cr; (b) deposition of polyimide PI-2611; (c) deposition of UV-resist by spin-coating; (d) UV patterning process; (e) second thermal evaporation of metal Au/Cr; (f) removing of residual UV-resist by acetone.

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