Figure 4
From: On the insulator-to-metal transition in titanium-implanted silicon
Top-view SEM image of the metallic sample PLA-1.2 × 1016 cm−2 (a), the insulating sample FLA-1.2 × 1016 cm−2 (b) and the insulating sample PLA-2 × 1015 cm−2 (c). The light-grey dots (sample FLA-1.2 × 1016 cm−2) and nets (sample PLA-1.2 × 1016 cm−2) are Ti-rich phases as identified by energy-dispersive X-ray spectroscopy. The inset in (a) displays a cross-sectional HAADF-STEM micrograph together with a Ti map (green color) obtained by energy-dispersive X-ray spectroscopy for the region marked by the green rectangle.
