Table 2 Fitting results of EIS for Cu at different thickness of TEL.
Thickness/μm | 1000 | 400 | 200 | 100 |
---|---|---|---|---|
Rs/Ω·cm2 | 47.5 | 31.6 | 66.4 | 104.3 |
CPE1/F·cm2 | 5.69E-05 | 6.85E-05 | 7.47E-05 | 10.0E-05 |
n1 | 0.692 | 0.720 | 0.719 | 0.745 |
Rf/Ω·cm2 | 77.2 | 73.6 | 51.4 | 152 |
CPE2/F·cm2 | 7.6E-04 | 8.8E-04 | 8.2E-04 | 7.0E-04 |
n2 | 0.512 | 0.482 | 0.466 | 0.545 |
Rct1/Ω·cm2 | 1428 | 1734 | 1643 | 1195 |
CPE3/F·cm2 | 4.25E-03 | 5.79E-03 | 6.41E-03 | 1.43E-03 |
n3 | 0.702 | 0.678 | 0.702 | 0.859 |
Rct2/Ω·cm2 | 2763 | 2322 | 1874 | 1453 |