Figure 1 | Scientific Reports

Figure 1

From: Anti-reflectance investigation of a micro-nano hybrid structure fabricated by dry/wet etching methods

Figure 1

Process flow of hybrid structures. The hybrid structures include two steps. For the samples in paper, the first step is dry etching by ICP, fabricating the micro structures. In the second step, the samples could be treated by dry etching or wet etching, which shows different results of reflectance. For the details of recipe number, Table 1 indicates specific process flow of each number of sample.

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