Figure 5 | Scientific Reports

Figure 5

From: Anti-reflectance investigation of a micro-nano hybrid structure fabricated by dry/wet etching methods

Figure 5

Nanostructures on a flat substrate obtained using the wet etching method: (a) top view of a low-magnification micrograph, (b) nanostructures on the side wall and surface, and (c) high-magnification SEM image of nanostructures on the surfaceof the pits. (a) Shows a micrograph of the nanostructures grown on a flat substrate using the wet etching method, captured at low magnification. The growth condition is similar to that of the top surface of the tips and pits with a thick black silicon forest. In addition, (b) shows that nanostructures can be fabricated on a vertical side wall with higher grass on the bottom of the side wall. A high-magnification SEM image of the nanostructures on the surface, as presented in (c), shows denser grass than that observed for the tips and pits.

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