Figure 3

Summary of measured TCF values of ZnO SAW samples based on different Al substrates changing with a normalized wavelength λ/h. The TCF values of ZnO/Si SAW devices are plotted as a reference.

Summary of measured TCF values of ZnO SAW samples based on different Al substrates changing with a normalized wavelength λ/h. The TCF values of ZnO/Si SAW devices are plotted as a reference.