Figure 4
From: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography
TEM micrographs and elemental maps showing chemical composition of 140-nm antennas. Left: TEM bright field micrographs of 140-nm EBL and FIB antennas. Right: HAADF image of the antennas presenting the distribution of heavy elements and spatial maps of element-specific X-ray intensity obtained from EDS for N, Si, Au, Ti, C, Ga, and O.
