Figure 5
From: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography
Thickness profile of a 140-nm FIB antenna and the hydrocarbon contamination on its surface. (a) Relative thickness (thickness in terms of IMFP) of the antenna retrieved by EELS. (b) Topography of the antenna including the hydrocarbon contamination measured by AFM. (c) Linear cross-sections of thickness profiles along the lines shown in (a) and (b). Relative thickness is recalculated to absolute thickness using the IMFP in gold of 113 nm. Blue line shows the thickness profile of the antenna determined by EELS, red line shows the thickness profile of the antenna and the contamination layer determined by AFM.
