Table 1 Metal flux (In +Ga with one to one ratio), growth time, and growth rate of samples.
From: Droplet Controlled Growth Dynamics in Molecular Beam Epitaxy of Nitride Semiconductors
Sample | Metal flux (1014 atoms cm−2 s−1) | Growth time (mins) | Metal dose (1016 atoms cm−2) | Growth rate (nm/min) |
---|---|---|---|---|
A | 0.39 | 120 | 28 | 0.65 |
B | 0.78 | 120 | 56 | 1.20 |
C | 0.98 | 120 | 71 | 1.67 |
D | 1.17 | 120 | 84 | 1.46 |
E | 1.41 | 90 | 76 | 1.30 |
F | 1.96 | 45 | 53 | 1.37 |
G | 2.94 | 45 | 79 | 1.32 |
H | 2.94 | 90 | 158 | 1.42 |
I | 2.94 | 150 | 264 | 1.67 |
J | 3.92 | 60 | 141 | 1.03 |
K | 7.83 | 90 | 423 | 0.83 |