Figure 2
From: Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
Illustration of multi-cantilever piezoresistive temperature sensor.
Figure 2 | Scientific Reports
From: Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
Illustration of multi-cantilever piezoresistive temperature sensor.
