Table 2 The relationship between the coefficient of piezoresistance and the direction of current and strain.
From: Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process
Direction of strain | Direction of current | Coefficient of piezoresistance |
|---|---|---|
〈100〉 | 〈100〉 | π 11 |
〈100〉 | 〈010〉 | π 12 |
〈110〉 | 〈110〉 | (π11 + π12 + π44)/2 |
〈110〉 | 〈1\(\overline{1}\)0〉 | (π11 + π12 − π44)/2 |
