Figure 1
(a) LN AFM system equipped with humidity, thermal, and oxygen sensors. The oxygen sensor is used for safety purpose. (b) Plot of the humidity and temperatures in the AFM measurement environments. (c) AFM images of HfO2 film at a relative humidity of 35%. The RMS roughness is 0.13 nm at a 500 nm FOV. (d) AFM images of HfO2 film at a low humidity level of less than 10%. The RMS roughness is 0.15 nm at a 500 nm FOV at a position identical to that in panel (c).
