Figure 4
(a) Inline production auto-AFM. (b) AFM image of a hafnium oxide thin layer demonstrating the capability of roughness measurements in a fabrication facility (Fab) environment.
Figure 4 | Scientific Reports
(a) Inline production auto-AFM. (b) AFM image of a hafnium oxide thin layer demonstrating the capability of roughness measurements in a fabrication facility (Fab) environment.
