Table 5 Peak fitting parameters for P 2p3/2 components before and after annealing as well as for as-grown and S-treated samples.

From: Unusual oxidation-induced core-level shifts at the HfO2/InP interface

 

Shape

FWHM (eV)

BE position (eV)

B

GL(80)

0.39–0.45

128.55–128.85

I1

GL(80)

0.35–0.5

B-0.18

I2

GL(80)

0.35–0.5

B + 0.3

O1

GL(65)

0.65–0.85

B + 3.51

O2

GL(65)

0.65–0.85

B + 4.5

O3

GL(65)

0.65–0.9

B + 4.97

O4

GL(65)

0.65–1.0

B + 5.3

  1. BE position of components O1–O4 was allowed to vary 0.1 eV from their fixed position.
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