Figure 4

(a) HRTEM image of the bottom layer in the annealed Hf6B21Si19C4N47 film. (b) Bright-field TEM image of the bottom layer in the annealed Hf7B23Si22C6N40 film.
(a) HRTEM image of the bottom layer in the annealed Hf6B21Si19C4N47 film. (b) Bright-field TEM image of the bottom layer in the annealed Hf7B23Si22C6N40 film.