Figure 5

(a) HRTEM image taken from the bottom layer in the annealed Hf7B23Si22C6N40 film, (b,c) HRTEM images of boundary areas showing lattice images of h-Si3N4 and BN, respectively.

(a) HRTEM image taken from the bottom layer in the annealed Hf7B23Si22C6N40 film, (b,c) HRTEM images of boundary areas showing lattice images of h-Si3N4 and BN, respectively.