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Figure 1

From: Scalable Epitaxial Growth of WSe2 Thin Films on SiO2/Si via a Self-Assembled PtSe2 Buffer Layer

Figure 1

The epitaxial growth of WSe2. (a) The synthesis process of WSe2 with a W/Pt/Ta/SiO2/Si substrate through a two-step selenization process. (b) Cross-sectional SEM image of a FIB-prepared lamella. Right up is a TEM image for WSe2, and right below is the SAED pattern, confirming the [001] oriented WSe2 lattice structure. (c) XRD patterns of the stacked film. Highly [001] orientated WSe2 is shown. ∇ and * stand for peaks from PtSe2 and Pt2W, respectively. (d) 2D-GIXRD image. (e) SEM top-view image of the WSe2 film showing smooth surface morphology.

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