Figure 2

XRD patterns of the commercial LFP target and as-deposited LFP film (a), SEM images of as-deposited LFP film from the top view (b), and cross-sectional view (c) and EDX analysis of the as-deposited LFP film (d).
XRD patterns of the commercial LFP target and as-deposited LFP film (a), SEM images of as-deposited LFP film from the top view (b), and cross-sectional view (c) and EDX analysis of the as-deposited LFP film (d).