Table 1 Electrochemical properties of LFP films annealed at various temperatures.

From: Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

 

400 °C

500 °C

600 °C

700 °C

Discharge capacity of the 1st cycle

(µAh cm−2 µm−1)

8

36

29

32

Discharge capacity of the 50th cycle

(µAh cm−2 µm−1)

2

28

8

24

Discharge capacity of the 100th cycle

(µAh cm−2 µm−1)

18

22

Capacity retention (%) 1st–50th cycle

25

78

29

75

Capacity retention (%) 1st–100th cycle

50

70