Figure 2

Comparison of structural and compositional change at the Si-Ge interface in terms of the presence of post-growth thermal annealing. (a) STEM and HRTEM (inset) image of the As-grown Ge-on-Si. Composition of Ge and Si atom measured by EDS mapping for the same region is shown on the right side of the STEM image. (b) After thermal annealing at 800 °C for 10 minutes.