Figure 4

C1 sample (left) and H1 sample (right), bright field TEM image showing the full depth of the ion-implanted layer. The Bragg peak has a SRIM damage-dose of 0.2 dpa.
C1 sample (left) and H1 sample (right), bright field TEM image showing the full depth of the ion-implanted layer. The Bragg peak has a SRIM damage-dose of 0.2 dpa.