Figure 3

Typical two-dimensional atomic force microscopy (AFM) surface profiles (Scan size was 20 × 20 μm) and eight-level height profiles along the blue lines in the AFM images: (a) silicon master stamp and (b) patterned HSQ multi-layer.
Typical two-dimensional atomic force microscopy (AFM) surface profiles (Scan size was 20 × 20 μm) and eight-level height profiles along the blue lines in the AFM images: (a) silicon master stamp and (b) patterned HSQ multi-layer.