Figure 5
From: Surface modification of multilayer FePS3 by Ga ion irradiation
The AFM and optical images of FePS3 sample with thicknesses of 103 nm (S2): (a) The AFM image of sample S2 before irradiation. (b) The AFM image of sample S2 after irradiation. (c,d) The optical image of sample S2 before and after irradiation. (e) The change of thickness along the yellow arrow line in the direction of the arrow.
