Figure 3 | Scientific Reports

Figure 3

From: Stress-controlled decomposition routes in cubic AlCrN films assessed by in-situ high-temperature high-energy grazing incidence transmission X-ray diffraction

Figure 3

Experimental assessment for film B deposited at 400 °C: the development of the unstrained lattice parameter d0(T) of c-Cr(Al)N and w-Al(Cr)N phase over the temperature (a), the thermal expansion coefficient calculated for the individual reflections (b) and the evolution of thermal, intrinsic and residual strain over the temperature cycle for c-Cr(Al)N (red) and w-Al(Cr)N (green), respectively (c). The vertical red dashed line represents the deposition temperature, the green dashed line the onset of the phase decomposition and the vertical black segmented lines the beginning and the end of the holding segment.

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