Figure 5

Correlations between applied deposition temperature TS and (i) the intrinsic stress σi, c-CrN, (ii) the thermal stress σth, c-CrN, (iii) the resulting residual stress σr, c-CrN in the as-deposited state (a), (iv) the decomposition onset stress σd, c-CrN (b) and (v) the onset temperature of phase decomposition (c) To,d for films A (TS = 475 °C), B (TS = 400 °C) and C (TS = 325 °C).