Table 2 Al and Cr content and Al/Cr ratio measured by EDS for thin films A, B and C.

From: Stress-controlled decomposition routes in cubic AlCrN films assessed by in-situ high-temperature high-energy grazing incidence transmission X-ray diffraction

 

A

B

C

Al [%]

63.5 ± 1.0

63.5 ± 1.0

63.3 ± 1.0

Cr [%]

36.5 ± 1.0

36.5 ± 1.0

36.7 ± 1.0

Al/Cr ratio

1.74

1.74

1.72

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