Table 3 Hardness and indentation modulus for films A, B and C, in as-deposited and annealed state.

From: Stress-controlled decomposition routes in cubic AlCrN films assessed by in-situ high-temperature high-energy grazing incidence transmission X-ray diffraction

 

as-deposited

annealed

A

B

C

A

B

C

H [GPa]

32.9 ± 3.5

32.9 ± 3.8

35.6 ± 2.7

28.8 ± 2.7

26.5 ± 2.0

28.7 ± 2.3

Ei [GPa]

449 ± 28

470 ± 32

484 ± 41

411 ± 28

425 ± 30

316 ± 19

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