Figure 4
From: Unmixing noisy co-registered spectrum images of multicomponent nanostructures

Retrieved abundance profile (a) and corresponding EELS spectral endmembers. (b) EELS spectra are shown with confidence envelope calculated using a procedure described in the SI (S3). Spectra were scaled and offset for clarity. The logarithm of the STEM-ADF intensity is plotted on top of the image with corresponding shaded areas (Fig. 1) are drawn as a guide. Arrows on abundance map indicate the presence of thin TiN gate layers.