Figure 3

(a) Bond length distributions and (b) bond angle distributions for pure, B 7.81 at.% doped, N 7.81 at.% doped, and Cl 7.81 at.% doped a-C films, respectively.
(a) Bond length distributions and (b) bond angle distributions for pure, B 7.81 at.% doped, N 7.81 at.% doped, and Cl 7.81 at.% doped a-C films, respectively.