Figure 6

The optimized structures of the initial, intermediate, and final states for the F diffusion in the a-C films; (a) Pure, (b) B doped, (c) N doped, and (d) Cl doped a-C films. Drawings are produced by VESTA³⁸ (ver. 3.4.7) software (https://jp-minerals.org/vesta/en/download.html).