Figure 7

Minimum energy path of F diffusion, corresponding to the initial, transition, intermediate, transition and final states; Pure (black), B doped (green), N doped (blue), and Cl doped (red) a-C films.
Minimum energy path of F diffusion, corresponding to the initial, transition, intermediate, transition and final states; Pure (black), B doped (green), N doped (blue), and Cl doped (red) a-C films.