Figure 4

Fabrication of SiO2 nanofiber filter chip. (a) Process flow of SiO2 nanofiber filter chip with cavity structure. (b) Fine patterning of SiO2 nanofiber (Both Si substrate and platinum catalyst are required for SiO2 nanofiber formation).
Fabrication of SiO2 nanofiber filter chip. (a) Process flow of SiO2 nanofiber filter chip with cavity structure. (b) Fine patterning of SiO2 nanofiber (Both Si substrate and platinum catalyst are required for SiO2 nanofiber formation).